CHEMFLUOR® PFA
Stringent quality control, state-of-the art process control and outstanding customer service are the reasons why industry world-wide insists upon Chemfluor PFA (perfluoroalkoxy) tubing. Made from standard PFA resin for several critical, high- temperature applications, Chemfluor PFA is widely used in the Semiconductor industry.

• High Level of purity
• Excellent chemical resistance
• Retains higher mechanical strength at elevated temperatures compared to PTFE
• High resistance to stress cracking

Applications: Semiconductor

• Wet Benches
• DI water transfer

CHEMFLUOR® FEP
Fluorinated ethylene propylene (FEP) is a chemically inert thermoplastic. Chemfluorí FEP Tubing can be made out of various grades of FEP to Tailor properties to the needs of the application: low molecular weight resin for general purpose use and high molecular weight resin for applications that require improved resistance to stress cracking. Chemfluor® FEP Tubing is available in numerous sizes and configurations including microbore, shrink tubing and roll covers.

• Excellent physical and electrical properties
• Outstanding chemical resistance
• Wide range of working temperatures -400°F (-240°C) to 400°F (240°C)

Applications: Semiconductor

• DI water transfer
• Bulk chemical transfer
  

CHEMFLUOR® PFA HP
Chemfluor PFA HP tubing can be made of either Teflon PFA 440 or PFA 450 HP resin, depending on your needs and application. The high-purity grades of Chemfluor PFA have one of the lowest extractable levels of virtually all the fluoropolymer tubings available in the market. In an independently conducted test, Chemfluor PFA 450, made of Teflon PFA 450 HP resin, was found to be smoother than any other tubing made of the same resin.

• Highest Level of purity
• Excellent chemical resistance

Applications: Semiconductor

• High Purity-chemical transfer
• DI water transfer

CHEMFLUOR® 367
Chemfluor 367, a unique fluoropolymer tubing, maintains fluid integrity and in many significant ways outperforms tubing made from standard, even high-purity PFA resin. The surface of Chemfluor 367 is up to six times smoother than tubing made of standard and high purity PFA resin, resulting in less cross contamination, greater productivity yields and easier to clean systems. Chemfluor 367 also has one of the lowest parts-per-billion of leachables when tested with DI water and nitric acid.

A working temperature range of -400°F (-240°C) to 450°F (232°C), Chemfluor Scientific Grade Tubing can be used in virtually any application where maintaining high purity is critical.

• Vastly superior surface smoothness as compared to other fluoropolymer tubings
• Very low extractables with deioinized water and acids
• Superior clarity versus other fluoropolymer tubings
• Resistant to virtually all commonly used chemicals
• Excellent mechanical properties

Applications: Semiconductor Processing

• CMP Equipment Lines
• Wet Processing Lines