| RESIN | PROPERTIES | APPLICATIONS |
Thermoplastics polyester
(Ertalyte PET-P)
(Hydex 4101 PBT) | High purity, low outgassing and high wear resistance. | Water tracks and retaining rings in chemical-mechanical polishing equipment. |
Polycarbonate
(Hyzod. Lexan. Zelux M&W) | High purity, low outgassing and toughness. | Retaining fixtures and windows for plasma-etch equipment. |
Polysulfone
(Thermalux) | Continuous use up to 302° F. | Retaining fixtures on plasma-etch equipment. |
| FR Polypropylene
(Flametec CP7-D)
(Propylux FR, Proteus 18G) | Best overall fire resistant qualities of any competitive FRP materials. | Front end bath/rinse stations, scrubbers, cabinets, etching equipment. |
CPVC
(Corzan 4910) | Excellent corrosion resistance at elevated temperatures up to 210°F. | Front end bath/rinse/stations, tank liners. |
PVDF
(Kytec, Hylar)
(Westlakeí PVDF, Hyde PVDF) | Resists a wide variety of corrosive chemicals including strong acids and is U.V. resistant, meets 4910 requirements. | Wafer cleaning equipment. Wet etch equipment Wafer carriers for chemical or water wash. |
ECTFE
(Halar) | Resists a wide variety of corrosive chemicals including strong acids, chlorine and aqueous caustic solutions. Ultra low leaching and extraction levels. | Wafer cleaning equipment parts, wet etch equipment, wafer carriers for chemical or water wash. |
PVDF/TFE/HFP
(ClariflexTM) | High purity, 90% light transmission. Extreme flame resistance, flexibility. Low permeability and FDA approved. | Semiconductor equipment window components Flame resistant substitute for polycarbonate. |
| Polyimide
(Duratron XP, Vespel) | Continuous use up to 580° F, low outgassing, high strength and stiffness. | Wafer combs and vacuum-wand tips for handling equipment; Plasma-etch equipment clamps, focus rings, screws, and caps. |
Polybenzimidazole
(Celazole PBI) | Continuous use up to 750° F, low outgassing, chemical resistance, purity, high strength and stiffness. | Wafer combs and vacuum-wand tips for for handling equipment; Plasma-etch equipment clamps, caps; Contactors nests, and sockets for back-end equipment. |
Polyetherimide
(Tempalux, Westlake)
(Ultem 1000, DSM -EPP, HYDE) | Continuous use up to 340° F, high strength and stiffness. | Wafer combs for handling equipment; Plasma-etch, retaining rings, thermal isolators blade packs, and sockets for back-end test equipment. |
| Polyphenylene Sulfide (Techtron PPS) | Continuous use up to 425° F, very low outgassing, chemical resistance. | Vacuum-wand tips, handles, flat finders on wafer-handling equipment; retaining rings for chemical mechanical polishing equipment. |
| Polyetheretherketone
(PEEK, DSM-EPP, Westlake, HYDE) | Continuous use up to 480° F, very low outgassing, chemical resistance. | Vacuum-wand tips and handles; flat finders on wafer-handling equipment. |
Polyamide-imide
(Torlon PAI) | Continuous use up to 500° F, low outgassing, purity, high strength and stiffness. | Test equipment nests, contactors, sockets, wear pads, guide rails; wafer combs and vacuum-wand tips for handling equipment. |
Static-dissipative acetal (Pomalux SD)
(Semitron ESd 225, Hydel ASD) | Surface volume resistivity of 1010 to 1012 Omega / sq. | Wafer combs, vacuum-wand tips,handles and flat finders for handling equipment. |
Static-dissipative Polyethersulfone
(Semitron ESd 420) | Surface volume resistivity of 106 to 109 Omega / sq. | Tooling fixtures for storage device handling equipment and connectors and nesting sites for back end test handlers. |
Static-Control
Polyetherimide (Semitron ESd 410C) (Tempalux CN-F, Hydel PEI7) | Surface volume resistivity of 104 to 106 Omega / sq, heat resistance, high strength and stiffness. | Wafer combs, vacuum-wand handles for handling equipment; handling trays and boat inserts for back-end test equipment. |
| Static-dissipative PTFE (Semitron ESd 500) | Continuous use to 500°F surface volume resistivity of 1010 to 1012 Omega / sq, high purity, and excellent chemical resistance. | Thermal isolators, boat inserts, and seal adapters for back-end test equipment. |
Static Dissipative PAI
(Polyamide imide Semitron ESd 520 HR) | Surface volume resistivity of 1010 to 1012 Omega / sq, 520°F heat resistance, high strength and stiffness. | Back end test equipment nest, contactors, sockets and boat inserts. |