|    | WAFER MANUFACTURING COMPONENTS | FRONT END PROCESSING EQUIPMENT - BATH STATIONS, WET BENCHES, CABINETS FLAME RETARDANT MATERIALS CONTINUED  ETFE & ECTFE WESTLAKE® ETFE (Made from TEFZEL® ethylene-tetrafluoroethylene resin) - Formable thin gauge sheet
- Film
All WESTLAKE ETFE Products are: - Free of fillers, lubricant and plasticizers which could leach and contaminate
- Virtually unaffected by most common corrosive chemicals
- Extremely durable with nylon-like abrasion characteristics
- UL94 rated V-0 at .062 " thick
- Very versatile with a continuous-use temperature range of -148°F to 311°F
APPLICATIONS: - Chemical applications where mechanical strength, abrasion resistance and weldability are critical
Parts made from WESTLAKE ETFE and ECTFE products are used in chemical handling systems and wafer processing. These include: - Wafer cleaning equipment parts
- Wet etching equipment parts
- Vacuum chucks
- Fittings
- Machined components
- Wafer carriers for chemical or water wash
WESTLAKE® ECTFE (Made from HALAR® ethylene-chlorotrifluoroethylene resin) - Machinable rod
- Machinable heavy gauge sheet
- Formable thin gauge sheet
- Film
All WESTLAKE ECTFE Products are: - Resistant to strong bases, and leaching and permeation
- Optimal materials for use with strong hydroxide solutions, acetic acids and solvents
- Chemical resistance up to 300°F
- Micro smooth with a surface that is highly resistant to bacterial adhesion and particulate generation
- Readily machinable and easily welded using standard plastic welding technology
- UL94 rated V-0 at .007 " thick
- In addition, WESTLAKE ECTFE thin gauge sheet can be thermoformed
APPLICATIONS: - Wafer cleaning equipment parts
- Wet etching equipment parts
- Filtration systems
- Wafer carriers for chemical or water wash
- DI water systems and tank linings
| Summary of thickness UL 94 Rated V-O | | Westlake Product | Resin Generic Name | Resin Trade Name | Rated Thickness (in) | | WESTLAKE ® PVDF | Polyvinylidene fluoride | KYNAR® 460 | .005 * | | | 0 | KYNAR® 740 (FM) | .062 | | | 0 | KYNAR® FLEX 2800 | .062 | | | 0 | KYNAR® 2850 (FM) | .062 | | WESTLAKE ® ECTFE | Ethylene-chlorotrifluoroethylene | HALAR ® | .007 * | | WESTLAKE ® ETFE | Ethylene-tetrafluoroethylene | TEFZEL ® | .062 | | TEMPALUX ® (PEI) | Polyetherimide | ULTEM ® 1000 | .016 * | | ZELUX ® M&W | Polycarbonate | - | .375 | | ZELUX ® M-FR | Flame Retardant PC | - | .120 | | ZELUX ® M-SD | Static Dissipative PC | - | .004 * | | ZELUX ® M-CN | Conductive PC | - | .008 * | | THERMALUX® (PSO) | Polysulfone | UDEL ® P1700 | .176 | | WESTLAKE ® PAR | Polyarylate | ARDEL ® | .125 | | WESTLAKE ® PPSU | Polyphenylsulfone | RADEL ® R | .031 | | WESTLAKE ® PES | Polyethersulfone | RADEL ® A | .031 | | PROPYLUX ® FR | Polypropylene | - | .125 | | | 0 | - | .016 * | | CLARIFLEXtm | PVDF/TFE/HFP | - | .033 | * Film rating VTM- (.020" and below) |