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WAFER MANUFACTURING COMPONENTS

FRONT END PROCESSING EQUIPMENT - BATH STATIONS, WET BENCHES, CABINETS
FLAME RETARDANT MATERIALS CONTINUED


ETFE & ECTFE

WESTLAKE® ETFE (Made from TEFZEL® ethylene-tetrafluoroethylene resin)

  • Formable thin gauge sheet
  • Film

All WESTLAKE ETFE Products are:

  • Free of fillers, lubricant and plasticizers which could leach and contaminate
  • Virtually unaffected by most common corrosive chemicals
  • Extremely durable with nylon-like abrasion characteristics
  • UL94 rated V-0 at .062 " thick
  • Very versatile with a continuous-use temperature range of -148°F to 311°F

APPLICATIONS:

  • Chemical applications where mechanical strength, abrasion resistance and weldability are critical

Parts made from WESTLAKE ETFE and ECTFE products are used in chemical handling systems and wafer processing. These include:

  • Wafer cleaning equipment parts
  • Wet etching equipment parts
  • Vacuum chucks
  • Fittings
  • Machined components
  • Wafer carriers for chemical or water wash

WESTLAKE® ECTFE (Made from HALAR® ethylene-chlorotrifluoroethylene resin)

  • Machinable rod
  • Machinable heavy gauge sheet
  • Formable thin gauge sheet
  • Film

All WESTLAKE ECTFE Products are:

  • Resistant to strong bases, and leaching and permeation
  • Optimal materials for use with strong hydroxide solutions, acetic acids and solvents
  • Chemical resistance up to 300°F
  • Micro smooth with a surface that is highly resistant to bacterial adhesion and particulate generation
  • Readily machinable and easily welded using standard plastic welding technology
  • UL94 rated V-0 at .007 " thick
  • In addition, WESTLAKE ECTFE thin gauge sheet can be thermoformed

APPLICATIONS:

  • Wafer cleaning equipment parts
  • Wet etching equipment parts
  • Filtration systems
  • Wafer carriers for chemical or water wash
  • DI water systems and tank linings

Summary of thickness UL 94 Rated V-O
Westlake Product
Resin Generic Name
Resin Trade Name
Rated Thickness (in)
WESTLAKE ® PVDF
Polyvinylidene fluoride
KYNAR® 460
.005 *
 
0
KYNAR® 740 (FM)
.062
 
0
KYNAR® FLEX 2800
.062
 
0
KYNAR® 2850 (FM)
.062
WESTLAKE ® ECTFE
Ethylene-chlorotrifluoroethylene
HALAR ®
.007 *
WESTLAKE ® ETFE
Ethylene-tetrafluoroethylene
TEFZEL ®
.062
TEMPALUX ® (PEI)
Polyetherimide
ULTEM ® 1000
.016 *
ZELUX ® M&W
Polycarbonate
-
.375
ZELUX ® M-FR
Flame Retardant PC
-
.120
ZELUX ® M-SD
Static Dissipative PC
-
.004 *
ZELUX ® M-CN
Conductive PC
-
.008 *
THERMALUX® (PSO)
Polysulfone
UDEL ® P1700
.176
WESTLAKE ® PAR
Polyarylate
ARDEL ®
.125
WESTLAKE ® PPSU
Polyphenylsulfone
RADEL ® R
.031
WESTLAKE ® PES
Polyethersulfone
RADEL ® A
.031
PROPYLUX ® FR
Polypropylene
-
.125
 
0
-
.016 *
CLARIFLEXtm
PVDF/TFE/HFP
-
.033
* Film rating VTM- (.020" and below)

 

   
 
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