In wafer processing, most environments are characterized by high temperature, aggressive chemicals and the need for resins with very high purity. Many handling applications require the use of non-metal wear materials for applications where parts actually come in contact with the wafer. Many common materials for parts such as retainers, locators, pushers and combs are: Acetal, PVDF, Ultem, PEEK and Polyimide. The wafer handling transfer equipment also have a need for static control products to protect the wafers from static discharge. Examples of such applications are the combs on wafer boat transfer equipment. Electrical shock due to static discharge can confuse the transfer equipment and damage the wafers. Combs manufactured from Semitrontm ESd 225 dissipate static charges in a controlled manner.

KetronTM PEEK is used for vacuum wand handles since they typically contact heat and common process chemicals in use.

The high temperature capability and purity of Duratron XP polyimide, make it well suited for applications for wand tips and wafer boat handling tools in the clean room. (Prior materials: PPS, PEEK Vespel* PI).

Wafer combs made of static dissipative SemitronTM ESd 225 eliminate transfer equipment discharge problems that cause millions of dollars in lost wafers every year.

Retainers valve caps and locators manufactured from DuratronTM XP polyimide have the purity and thermal stability needed to excel in applications on hot wafer handling equipment.

Static Dissipative Products with Thermal Capabilities to 225°F (107°C) Static Dissipative Acetals

Semitron^TM ESd 225
Semitrontm ESd 225 is ideal for fixturing used in manufacturing of hard disk drives or for handling in-process silicon wafers. It is tan in color.

• Surface Resistivity: less than or equal to 10¹⁰ Omega/sq
• Thermal Performance to 225°F (107°C)
• Good Wear Resistance

ULTEM 1000 Polyetherimide
PEI is an amorphous polymer offering high strength and excellent flame resistance. It performs continuosly to 340°F (170°C), making it ideal for high strength/high heat applications, and those requiring consistent dielectric properties over a wide frequency range.